Preparation of diamond films as an infrared optical material by high power microwave plasma CVD

被引：0
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作者：
Yu, Shengwang [1 ]
An, Kang [1 ]
Li, Xiaojing [2 ]
Shen, Yanyan [1 ]
Ning, Laiyuan [1 ]
He, Zhiyong [1 ]
Tang, Bin [1 ]
Tang, Weizhong [3 ]
机构：
[1] Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024, China
[2] The Ningbo Branch of Ordnance Science Institute of China, Ningbo 315103, China
[3] School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2013年 / 42卷 / 04期
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页码：971 / 974
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