A modulated feedback approach to improve closed loop MEMS accelerometer bias instability

被引:1
|
作者
Ma, Mingjun [1 ]
Jin, Zhonghe [1 ]
Liu, Yidong [1 ]
机构
[1] Micro-satellite Research Center, Zhejiang University, Hangzhou, China
关键词
D O I
10.4028/www.scientific.net/KEM.645-646.640
中图分类号
学科分类号
摘要
引用
收藏
页码:640 / 645
相关论文
共 50 条
  • [1] A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
    Ming-jun Ma
    Zhong-he Jin
    Hui-jie Zhu
    Frontiers of Information Technology & Electronic Engineering, 2015, 16 : 497 - 510
  • [2] A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer
    Ma, Ming-jun
    Jin, Zhong-he
    Zhu, Hui-jie
    FRONTIERS OF INFORMATION TECHNOLOGY & ELECTRONIC ENGINEERING, 2015, 16 (06) : 497 - 510
  • [3] CONTROL TUNING IN A CLOSED LOOP CAPACITIVE MEMS ACCELEROMETER
    Grigorie, Teodor Lucian
    Sandu, Dragos George
    Firanescu, Marin
    Trusca, Eugen
    Grigorie, Otilia
    GEOCONFERENCE ON NANO, BIO AND GREEN - TECHNOLOGIES FOR A SUSTAINABLE FUTURE, VOL I (SGEM 2014), 2014, : 45 - 52
  • [4] A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback
    Sun, Zhi Yuan
    Yin, Liang
    Yu, Jian Hai
    MODERN PHYSICS LETTERS B, 2019, 33 (35):
  • [5] Time Divided Architecture for Closed Loop MEMS Capacitive Accelerometer
    Huang, Jingqing
    Zhang, Tingting
    Zhao, Meng
    Hong, Lichen
    Zhang, Yacong
    Lu, Wengao
    Chen, Zhongjian
    Hao, Yilong
    2012 IEEE 11TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT-2012), 2012, : 460 - 462
  • [6] Closed-loop MEMS accelerometer: from design to production
    Grinberg, B.
    Feingold, A.
    Koenigsberg, L.
    Furman, L.
    2016 DGON INERTIAL SENSORS AND SYSTEMS (ISS), 2016,
  • [7] A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump
    Chu, Yixing
    Dong, Jingxin
    Chi, Baoyong
    Liu, Yunfeng
    SENSORS, 2016, 16 (03):
  • [8] A closed-loop MEMS accelerometer with capacitive sensing interface ASIC
    Liu, Minjie
    Chi, Baoyong
    Liu, Yunfeng
    Dong, Jingxin
    INTERNATIONAL JOURNAL OF ELECTRONICS, 2013, 100 (01) : 21 - 35
  • [9] Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer
    Liu, Heng
    Wu, Jiale
    Zhang, Yu
    MICROMACHINES, 2022, 13 (10)
  • [10] CMOS Interface Circuitry for a Closed-loop Capacitive MEMS Accelerometer
    Liu, Yuntao
    Liu, Xiaowei
    Yin, Liang
    Chen, Weiping
    Wu, Qun
    2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 510 - 513