Characterization of semiconductor materials at sub-micron scale using scanning capacitance microscopy

被引：0
|
作者：
Uchihashi, Takayuki [1 ]
Ishizuka, Yoshimori [1 ]
Yoshida, Haruhiko [1 ]
Kishino, Seigo [1 ]
机构：
[1] Dept. of Elect., Himeji Inst. of Tech., Shosha, Himeji 671-2201, Japan
来源：
Zairyo/Journal of the Society of Materials Science, Japan | 2002年 / 51卷 / 09期
关键词：
Scanning capacitance microscopes;
D O I：
10.2472/jsms.51.995
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：995 / 998
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