Research on preventive maintenance modeling method of semiconductor devices

被引：0
|
作者：
Ao Y. [1 ]
Chang P. [1 ]
机构：
[1] School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou
来源：
| 2017年 / Systems Engineering Society of China卷 / 37期
基金：
中国国家自然科学基金;
关键词：
Cost model; Detection period; Opportunity maintenance; Preventive maintenance;
D O I：
10.12011/1000-6788(2017)03-0782-08
中图分类号：
学科分类号：
摘要：
Semiconductor production is a complex manufacturing process. The maintenance of semiconductor equipment is costive and difficult. In order to lower maintenance costs and ensure steady operation of the whole production system, this paper strives to make preventive hierarchical maintenance considering opportunity maintenance for a degrading production line. We use the Gamma process to model the equipment degradation process. The objection of maintenance cost was analyzed under different detection periods. Optimization problem was solved through Monte Carlo simulation and renewal theory. The relationship of detecting cost and the detection interval are analyzed with this algorithm. The simulation shows that the preventive maintenance strategy is feasible and effective. © 2017, Editorial Board of Journal of Systems Engineering Society of China. All right reserved.
引用
下载
收藏
页码：782 / 789
页数：7
相关论文
共 22 条
  • [1] Chang P., Ao Y.H., Maintenance optimization of the OLED manufacturing process, Applied Mechanics & Materials, 577, pp. 90-93, (2014)
  • [2] Ding F., Tian Z., Opportunistic maintenance for wind farms considering multi-level imperfect maintenance thresholds, Renewable Energy, 45, 3, pp. 175-182, (2012)
  • [3] Zhang S.R., Wang C., Sun B., New stochastic process model for the time-varying reliability analysis of the deteriorating structures, Journal of Sichuan University (Engineering Science Edition), 45, 2, pp. 28-32, (2013)
  • [4] Richard Cassady C., Paul Murdock W., Pohl E.A., Selective maintenance for support equipment involving multiple maintenance actions, European Journal of Operational Research, 129, 2, pp. 252-258, (2001)
  • [5] Shi H., Zeng J.C., Preventive maintenance strategy based on life prediction, Computer Integrated Manufacturing Systems, 20, 5, pp. 1133-1140, (2014)
  • [6] De Smidt-Destombes K.S., Van Harten A., Availability of k-out-of-N systems under block replacement sharing limited spares and repair capacity, General Information, 107, 2, pp. 404-421, (2007)
  • [7] Sheu S.H., Griffith W.S., Extended block replacement policy with shock models and used items, European Journal of Operational Research, 140, 1, pp. 50-60, (2002)
  • [8] Pham H., Wang H., Optimal (τ, T) opportunistic maintenance of a k-out-of-n:G system with imperfect PM and partial failure, Naval Research Logistics, 3, pp. 223-239, (2000)
  • [9] Zhou X., Xi L., Lee J., Opportunistic preventive maintenance scheduling for a multi-unit series system based on dynamic programming, International Journal of Production Economics, 118, 2, pp. 361-366, (2009)
  • [10] Lin D., Zuo M.J., Yam R.C.M., Et al., Optimal system design considering warranty, periodic preventive maintenance, and minimal repair, Journal of the Operational Research Society, 51, 7, pp. 869-874, (2000)
123