Optoelectronic thin-film characterization

被引：0
|
作者：
Tas, G. [1 ]
Mukundhan, P. [1 ]
Johnson, T.A. [1 ]
Hambir, S.A. [1 ]
Howard, B. [1 ]
机构：
[1] Rudolph Technologies, Flanders, NJ, United States
来源：
Semiconductor International | 2001年 / 24卷 / 13期
关键词：
Metallizing - Mirrors - Pumping (laser) - Semiconducting aluminum compounds - Semiconducting gallium arsenide - Semiconducting indium phosphide - Semiconductor device manufacture - Semiconductor lasers - Silicon wafers - Sonar - Thin films;
D O I：
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中图分类号：
学科分类号：
摘要：
Picosecond sonar can characterize and monitor certain processes in compound semiconductors. As the optoelectronic market grows, high-volume manufacturing is becoming the norm, and competition is expected to demand ever tighter process control to maintain high yields and profits. In this environment, metrology techniques such as picosecond sonar are critical to success.
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页码：81 / 83
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