Preparation and Gas Sensing Characteristics of ZnO Nanowire Arrays Surface-decorated by Pd Particles

被引：0

作者：

Yang Z.-B. ^{[1
]}

Cao P.-J. ^{[1
]}

Han S. ^{[1
]}

Liu X.-K. ^{[1
]}

Liu W.-J. ^{[1
]}

Jia F. ^{[1
]}

Zeng Y.-X. ^{[1
]}

Xu W.-Y. ^{[1
]}

Zhu D.-L. ^{[1
]}

Lyu Y.-M. ^{[1
]}

机构：

[1] Shenzhen Key Laboratory of Special Functional Materials, College of Materials Science and Engineering, Shenzhen University, Shenzhen

来源：

Faguang Xuebao/Chinese Journal of Luminescence | 2017年 / 38卷 / 08期

基金：

中国国家自然科学基金;

关键词：

Gas sensing; Pd particle; Surface decoration; ZnO nanowire arrays;

D O I：

10.3788/fgxb20173808.1033

中图分类号：

学科分类号：

摘要：

ZnO nanowire (NW) arrays were synthesized by chemical vapor deposition (CVD) method on SiO2/Si substrate. The Pd films with different sputtering time (0-150 s) were uniformly deposited on the surface of ZnO NWs and converted to Pd particles by annealing treatment at 800℃ in Ar gas, and then the gas sensing measurement was performed. The length of the NW is about 15 μm and the diameter is 100-500 nm. For ethanol gas, the optimal working temperature of all gas sensors is 280℃. The increase of the sputtering time (from 3 to 10 s) induces the increase of the number and size of Pd particles, and the response of gas sensor raises from 2.0 to 3.6. Further increase of the sputtering time (from 30 to 150 s) leads to significant increase of the size of Pd particles and the formation of the continuous film, resulting in the significant decrease of the response. All the sensors exhibit the best gas selectivity to H2 gas, and the better properties of the response and recovery time and the response stability are obtained. Finally, the influence mechanism of Pd particle surface decoration on the ZnO NW array gas sensors was discussed. © 2017, Science Press. All right reserved.

引用

页码：1033 / 1038

页数：5

共 12 条

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