Experimental Study on the Influence of Inductively Coupled Plasma Operating Parameters on Coating Quality

被引：0
|
作者：
Zhan, Zhihua [1 ,2 ]
Wang, Chunhua [1 ]
Zhou, Qiujiao [3 ]
Liu, Chengzhou [2 ]
Zhao, Peng [2 ]
机构：
[1] Faculty of Physics, Hefei University of Technology, Hefei,230601, China
[2] Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei,230031, China
[3] Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen,440305, China
来源：
Diangong Jishu Xuebao/Transactions of China Electrotechnical Society | 2022年 / 37卷 / 11期
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摘要：
28
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页码：2725 / 2732
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