Static analysis and optimal design of θxθyZ micropositioner with planar compliant mechanisms

被引:0
|
作者
Wei H. [1 ]
Li W. [1 ]
Yang X. [1 ]
Wang Y. [1 ]
Wang C. [1 ]
机构
[1] School of Mechatronic Engineering, China University of Mining and Technology, Xuzhou
来源
Jiqiren/Robot | 2016年 / 38卷 / 05期
关键词
Dimension optimization; Flexure hinge; Statics; θ[!sub]x[!/sub]θ[!sub]y[!/sub]Z micropositioner;
D O I
10.13973/j.cnki.robot.2016.0557
中图分类号
学科分类号
摘要
A θxθyZ micropositioner is developed based on planar compliant mechanism. The static analysis is completed where only the planar deformation of each leg is taken into consideration. The effects of each leg on the mobile platform are analyzed separately. The Castigliano's theorem is utilized to derive the relationships between inputs and outputs. The relation between the displacement amplification of each planar leg and the structure dimensions is formulated. Then, the dimension parameters are optimized by means of genetic algorithm. Finally, the finite element analysis (FEA) and the experimental tests on two prototypes are accomplished. The results show that the static analysis and optimization method are reliable. The errors between the analytical model and the FEA are less than 4% while the errors between the analytical model and the experimental tests are less than 12%. © 2016, Science Press. All right reserved.
引用
收藏
页码:557 / 562
页数:5
相关论文
共 17 条
  • [1] Fu J.J., Yan C.X., Liu W., Et al., Stiffness optimization of two-axis flexible supporting platform for fast steering mirror, Optics and Precision Engineering, 23, 12, pp. 3378-3386, (2015)
  • [2] Du Z., Su Y., Yang W., Et al., Note: A piezo tip/tilt platform: Structure, kinematics, and experiments, Review of Scientific Instruments, 85, 4, (2014)
  • [3] Lobontiu N., Compliant Mechanisms: Design of Flexure Hinges, (2002)
  • [4] Wang H., Zhang X.M., Optimal design and experimental research for monolithic space 3-DOF precise positioning stage, Chinese Journal of Mechanical Engineering, 43, 3, pp. 66-71, (2007)
  • [5] Kim H., Kim J., Ahn D., Et al., Development of a nanoprecision 3-DOF vertical positioning system with a flexure hinge, IEEE Transactions on Nanotechnology, 12, 2, pp. 234-245, (2013)
  • [6] Luan Y.L., Rong W.B., Sun L.N., Analysis on stiffness model of 3-PPSR flexible parallel robot with high aspect ratio based on finite element method, Robot, 36, 6, pp. 730-736, (2014)
  • [7] Wang Y., Yao Z.Y., Geng R.R., Structure design of a parallel micromanipulator driven by linear ultrasonic motors, Robot, 37, 5, pp. 573-580, (2015)
  • [8] Reymond C., Le Gall B., Mohamed B., Ultra-high precision robotics: A potentially attractive area of interest for MM and IFToMM, Technology Developments: The Role of Mechanism and Machine Science and IFToMM, pp. 439-450, (2011)
  • [9] Kim H.S., Cho Y.M., Design and modeling of a novel 3-DOF precision micro-stage, Mechatronics, 19, 5, pp. 598-608, (2009)
  • [10] Lee H.J., Kim H.C., Kim H.Y., Et al., Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier, Review of Scientific Instruments, 84, 11, (2013)