Characterization of highly-aligned ZnO nanowire arrays and its application in humidity sensors

被引：0

作者：

Gu L. ^{[1
]}

Zheng K. ^{[1
]}

Sun D. ^{[1
]}

Mo X. ^{[1
]}

Chen G. ^{[1
]}

机构：

[1] Department of Materials Science, Fudan University

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2011年 / 31卷 / 03期

关键词：

Capacitance; Conductance; Humidity sensors; ZnO nanowire array;

D O I：

10.3969/j.issn.1672-7126.2011.03.20

中图分类号：

学科分类号：

摘要：

The highly-aligned ZnO nanowire arrays with c-axis preferred growth orientation along [0001] were fabricated in-situ by hydrothermal synthesis on the prefabricated, Au/Ni interdigitated electrodes. The impacts of the array fabrication conditions on microstructures of ZnO nanowires, and on configuration of the array were studied with X-ray diffraction, scanning electron microscopy, and high resolution transmission electron microscopy. The relationship between the relative humidity and its electrical properties was also evaluated. The results show that the ZnO nanowire arrays with favorable properties, including high sensitivity, fast response, and rapid recovery, are potential materials for humidity sensor fabrication.

引用

页码：352 / 356

页数：4

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