Development of AOI (Automatic Optical Inspection) system for defect inspection of patterned TFT-LCD panels using adjacent pattern comparison and border expansion algorithms

被引：0

作者：

Kang, Sung-Bum ^{[1
]}

Lee, Myung-Sun ^{[2
]}

Pahk, Heui-Jae ^{[3
]}

机构：

[1] SNUPrecision, Co., Ltd., Korea, Republic of

[2] Mechanical Engineering, Seoul National University, Korea, Republic of

[3] School of Mechanical and Aerospace Engineering, Seoul National University, Korea, Republic of

来源：

Journal of Institute of Control, Robotics and Systems | 2008年 / 14卷 / 05期

关键词：

D O I：

10.5302/J.ICROS.2008.14.5.444

中图分类号：

学科分类号：

摘要：

引用

页码：444 / 452

共 12 条

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