Measuring separation gap and visualizing a real contact area using white light spacer interferometry and HSV color space - Verification for resolution of 3 nm thickness-

被引：0

作者：

Eguchi, Masao ^{[1
]}

Yamamoto, Takashi ^{[1
]}

机构：

[1] Graduate School of Institute of Symbiotic Science and Technology, Tokyo University of Agriculture and Technology, 24-16, Naka-cho 2-chome, Koganei-shi, Tokyo 184 8588

来源：

Toraibarojisuto/Journal of Japanese Society of Tribologists | 2007年 / 52卷 / 05期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：381 / 388