3D image formation in transmitted partially coherent and incoherent light applied to dimensional inspection

被引：0
|
作者：
Chugui, Yuri V. [1 ,2 ,3 ]
Senchenko, Elena S. [1 ]
机构：
[1] Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41 Russkaya str, Novosibirsk,630058, Russia
[2] Novosibirsk State University, 2 Pirogova Street, Novosibirsk,630090, Russia
[3] Novosibirsk State Technical University, 20 K. Marksa Prospekt, Novosibirsk,630073, Russia
来源：
International Journal of Automation Technology | 2015年 / 9卷 / 05期
关键词：
D O I：
10.20965/ijat.2015.p0508
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：508 / 514
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