Generalized Particle Dynamics Method and Experimental Study of Crystalline Germanium Nano-Cutting Characteristics

被引：0
|
作者：
Luo L. [1 ]
Yang X. [1 ]
Geng R. [1 ]
机构：
[1] Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming
来源：
Xiyou Jinshu/Chinese Journal of Rare Metals | 2019年 / 43卷 / 12期
关键词：
Cutting force; Generalized particle dynamics; Multi-scale analysis; Single crystal germanium;
D O I：
10.13373/j.cnki.cjrm.XY18080008
中图分类号：
学科分类号：
摘要：
In order to improve the manufacturing precision of nanoscale germanium devices, a generalized particle dynamics (GP) analysis method was proposed, which was a multi-scale analysis method. Under the condition that the crystal structure of the material was constant, the calculation time was saved a lot, and the scale of simulation could be expanded, and the simulated area of the material could be increased by several orders of magnitude. In this paper, a generalized particle dynamic nano-cutting model of single crystal germanium was established, and the interaction potential energy function of the single crystal germanium was corrected. Also, the cutting force-scratch distance curves under different loads were plotted, and the changes of cutting force and chip accumulation state during the cutting process were analyzed. Furthermore, nano-scratch experiment on single crystal germanium was conducted by using the nano scratch tester. The results showed that: when the load was 10~30 mN, the depth of the groove varied from 1.12~1.88 nm and the range of width was 4.6~8.6 μm. The experimental results were consistent with that obtained by the generalized particle dynamics, which proved the effectiveness of the method. Compared with the molecular dynamics method, this method can save a lot of calculation time in the large system model on the premise of guaranteeing the accuracy of calculation. © Editorial Office of Chinese Journal of Rare Metals. All right reserved.
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页码：1325 / 1331
页数：6
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