Ablation morphology of germanium with multi-pulse femtosecond laser

被引：2

作者：

Xin J. ^{[1
]}

Tan F. ^{[1
]}

Luo G. ^{[2
]}

Ma X. ^{[1
]}

Zhao Z. ^{[1
]}

Han D. ^{[1
]}

机构：

[1] Research Center of Laser Fusion, CAEP, Mianyang 621900

[2] State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2011年 / 23卷 / 07期

关键词：

Ablation morphology; Ablation threshold; Femtosecond laser; Germanium; Scanning electron microscope;

D O I：

10.3788/HPLPB20112307.1753

中图分类号：

学科分类号：

摘要：

Ablation morphology on germanium surface using multi-pulse femtosecond laser is reported. The SEM and laser focus give magnified views of the ablated portion. The ablation morphology shows a periodic surface structure with various laser pulses. And the formation of amorphous rings and ripples in the damage spot is discussed. The ablation threshold is 1.2 J·cm-2 and the ablation depth with single femtosecond laser pulse is about 150 nm. It is meanful for research the interaction of femtosecond laser and material, and the application of femtosecond laser in micromachining.

引用

页码：1753 / 1757

页数：4

共 17 条

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