Formation of diamond like carbon by a pure carbon arc under high vacuum

被引:0
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作者
Tamba, Moritake [1 ]
Kawamura, Kazuhiko [2 ]
Okazaki, Kiyohiko [1 ]
Amemiya, Hiroshi [1 ]
机构
[1] Institute of Physical and Chemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan
[2] Chubu Electric Power Co., Inc., Electrotechnology Applications R and D Center, Research and Development Bureau, 2 0-1, Kitasekiyama, Ohdaka, Midori, Nagoya 459-8522, Japan
关键词
Radio frequency voltage;
D O I
10.1143/jjap.40.1064
中图分类号
学科分类号
摘要
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页码:1064 / 1066
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