Fabrication of a pendulous resonant micro-machined biosensor for direct liquid detection

被引：0
|
作者：
Electronic Materials Research Laboratory, Xi'an Jiaotong University, Xi'an, China [1 ]
不详 [2 ]
机构：
来源：
Key Eng Mat | / 1267-1272期
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
10.4028/www.scientific.net/KEM.645-646.1267
中图分类号：
学科分类号：
摘要：
Hydrofluoric acid - Plasma CVD - Fabrication - Q factor measurement - Biosensors - Silicon on insulator technology - Plasma enhanced chemical vapor deposition
引用
收藏
相关论文
共 45 条
  • [1] Fabrication of silicon-based bulk micro-machined amperometric microelectrode biosensor
    Liu, JW
    Han, JH
    Xia, SH
    Bian, C
    Xu, YY
    Chen, SF
    2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS, 2004, : 1784 - 1787
  • [2] Fabrication and characterization of micro-machined ultrasonic transducer
    Jia, CP
    Wiemer, M
    Zichner, N
    Otto, T
    Gessner, T
    2005 IEEE Ultrasonics Symposium, Vols 1-4, 2005, : 1945 - 1947
  • [3] Research on nonlinear vibration in micro-machined resonant accelerometer
    Department of Precision Instruments and Mechanology, Tsinghua University, 100084, Beijing, China
    Sensors Transducers, 2012, SPEC. 1 (14-21):
  • [4] Research on Nonlinear Vibration in Micro-machined Resonant Accelerometer
    Zhao Shuming
    Liu Yunfeng
    Wang Fan
    Dong Jingxin
    NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL, 2012, : 637 - 640
  • [5] A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals
    Jing-jing Wang
    Wei-hui Liu
    Da Chen
    Yan Xu
    Lu-yin Zhang
    Journal of Zhejiang University SCIENCE C, 2014, 15 : 383 - 389
  • [6] A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals
    Jingjing WANG
    Weihui LIU
    Da CHEN
    Yan XU
    Luyin ZHANG
    JournalofZhejiangUniversity-ScienceC(Computers&Electronics), 2014, 15 (05) : 383 - 389
  • [7] A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals
    Wang, Jing-jing
    Liu, Wei-hui
    Chen, Da
    Xu, Yan
    Zhang, Lu-yin
    JOURNAL OF ZHEJIANG UNIVERSITY-SCIENCE C-COMPUTERS & ELECTRONICS, 2014, 15 (05): : 383 - 389
  • [8] Optimization design and shock calibration of pendulous high-g micro-machined accelerometer
    Tao, Yong-Kang
    Liu, Yun-Feng
    Zhu, Ke-Yin
    Dong, Jing-Xin
    Zhendong yu Chongji/Journal of Vibration and Shock, 2015, 34 (01): : 53 - 57
  • [9] A micro-machined thin film electro-acoustic biosensor for detection of pesticide residuals
    Jing-jing WANG
    Wei-hui LIU
    Da CHEN
    Yan XU
    Lu-yin ZHANG
    Frontiers of Information Technology & Electronic Engineering, 2014, 15 (05) : 383 - 389
  • [10] Modal analysis and experiment of a silicon micro-machined resonant accelerometer
    Zhang X.
    He X.
    Yin Y.
    Fang Z.
    Han F.
    Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology, 2019, 27 (05): : 690 - 694and700
12345