Isotope analysis of diamond-surface passivation effect of high-temperature H2O-grown atomic layer deposition-Al2O3 films

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20152400926905
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[1] Hiraiwa, Atsushi
[2] Saito, Tatsuya
[3] Matsumura, Daisuke
[4] Kawarada, Hiroshi
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| 1600年 / American Institute of Physics Inc.卷 / 117期
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