First-principles molecular-dynamics simulations of etching process by OH molecules

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[1] [1,Goto, Hidekazu
[2] Hirose, Kikuji
[3] Mori, Yuzo
[4] Sugiyama, Kazahisa
[5] Inagaki, Koji
[6] Kobata, Itsuki
[7] 1,Toyota, Hiromichi
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Goto, Hidekazu | 2000年 / Osaka Univ, Osaka, Japan卷 / 50期
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