Preparation and properties of photosensitive polyimide/titania-silica hybrid materials

被引：32
|
作者：
Li, Liu [1 ]
Qinghua, Lu [1 ]
Jie, Yin [1 ]
Zikang, Zhu [1 ]
Daocheng, Pan [1 ]
Zongguang, Wang [1 ]
机构：
[1] Research Institute of Polymer Materials, School of Chemistry and Chemical Technology, Shanghai Jiao Tong University, Shanghai, 200240, China
来源：
Materials Science and Engineering C | 2002年 / 22卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Photolithography - Photosensitivity - Silica - Sol-gels - Thermodynamic stability;
D O I：
10.1016/S0928-4931(01)00312-5
中图分类号：
学科分类号：
摘要：
A complex inorganic-polymer hybrid material of polyimide/titania-silica with photolithographic property was prepared by sol-gel process. Polyimide (PI) was based on benzophone-3,3′, 4,4′ -tetracarboxylic dianhydride (BTDA) and 4,4′ -diamino-3,3′ -dimethyl- diphenylmethane (MMDA) and is negatively photosensitive. The introduction of titania leads to increased refractive index while the introduction of silica leads to improved thermal stability of the hybrid. © 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：61 / 65
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