Bringing a new fab on-line: How TSMC fab 6 got up and running

被引：0
|
作者：
Tsai, N.-S. [1 ]
机构：
[1] TSMC, No. 121, Park Ave. III, Hsinchu 300, Taiwan
来源：
Solid State Technology | 2001年 / 44卷 / 8 SUPPL.期
关键词：
Clean rooms - Electronics industry - Foundries - Industrial economics - Production - Silicon wafers;
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摘要：
Strategies for building new facilities have become especially important to players in the semiconductor industry. From this perspective, it makes sense for companies to plan not just for one fab, but for an entire series of manufacturing facilities to be built over a long period of time. An excellent example of this strategy is Taiwan Semiconductor Manufacturing Co. (TSMCs) Fab 6, which is now delivering 200mm wafers in volume production and fully functional 300mm customer chips.
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