Study on temperature dependence of infrared optical properties of vanadium dioxide thin film

被引：0

作者：

Wang H. ^{[1
]}

Li Y. ^{[1
,2
]}

Yu X. ^{[1
]}

Zhu H. ^{[1
,3
]}

Huang Y. ^{[1
]}

Zhang H. ^{[1
]}

Zhang W. ^{[1
]}

Zhou S. ^{[1
]}

机构：

[1] College of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology

[2] Shanghai Key Laboratory of Modern Optical System

[3] Institute of Thin Films and Nanomaterials, Wuyi University, Jiangmen

来源：

Guangxue Xuebao/Acta Optica Sinica | 2010年 / 30卷 / 05期

关键词：

Infrared properties; Numerical fitting; Optical constants; Thin film optics; Vanadium dioxide;

D O I：

10.3788/AOS20103005.1522

中图分类号：

学科分类号：

摘要：

Vanadium dioxide undergoes a reversible phase transition at approximately 68°C, and it is accompanied with drastic changes in its electrical and optical properties. It is difficult to get the accurate analytic expression dependent on temperature and wavelength through theoretical derivation, because phase transition mechanism is complex. Dispersion theory for refractive index and extinction coefficient of the vanadium dioxide thin film is studied, and its temperature-dependence dispersion formula of optical constants is presented by numerical fitting with Sellmeier dispersion model. By film matrix theory, the optical transmittance and reflectivity at different temperatures and wavelengths are calculated. In the use of magnetron sputtering, vanadium dioxide thin films of different thicknesses are deposited on glass, sapphire and silicon dioxide substrates. The optical transmittance and reflectivity of the films are measured, and the experimental curve agrees well with that of simulation.

引用

页码：1522 / 1526

页数：4

共 17 条

[1] Morin F.J., Oxide which show a metal-to-insulator at the neel temperature, Phys. Rev. Lett., 3, 1, pp. 34-36, (1959)
[2] Huang C., Xue Y., Xia Z., Et al., Damage induced by femtosecond laser in optical dielectric films, Chin. Opt. Lett., 7, 1, pp. 49-51, (2009)
[3] Zha Z., Wang Q., Li X., Et al., Experimental study of response properties of VO2 films to TEA CO2 laser, Acta Optica Sinica, 16, 8, pp. 1173-1176, (1996)
[4] Nag J., Haglund Jr. R.F., Synthesis of vanadium dioxide thin films and nanoparticles, J. Phys. Condens. Matter, 20, pp. 1-16, (2008)
[5] Suh J.Y., Donev E.U., Lopez Z., Et al., Modulated optical transmission of subwavelength hole arrays in metal-VO2 films, Appl. Phys. Lett., 88, 13, pp. 133115-133117, (2006)
[6] Mlyuka N., Kivaisi R., Correlation between optical, electrical and structural properties of vanadium dioxide thin films, J. Materials Science, 41, 17, pp. 5619-5624, (2006)
[7] Suh J.Y., Lopez R., Feldman L.C., Et al., Semiconductor to metal phase transition in the nucleation and growth of VO2 nanoparticles and thin films, Appl. Phys., 96, 2, pp. 1209-1213, (2004)
[8] Daimon M., Masumura A., High-accuracy measurements of the refractive index and its temperature coefficient of calcium fluoride in a wide wavelength range from 138 to 2326 nm, Appl. Opt., 41, 25, pp. 5275-5281, (2002)
[9] Li Y., Yi X., Zhang T., Nanostructure and thermal-optical properties of vanadium dioxide thin films, Chin. Opt. Lett., 3, 12, pp. 719-721, (2005)
[10] Wang Y., Zhang W., Fan Z., Et al., Analysis for accurately fitting the refractive index of SiO2 thin film, Chinese J. Lasers, 35, 5, pp. 760-763, (2008)

← 1 2 →