Fabrication and properties of the multi-layer pyroelectric thin film infrared detectors

In order to reduce the thermal dissipation from the pyroelectric film to the substrate and meet the needs of integration with silicon, the multi-layer pyroelectric thin film (MPTF) was introduced. It is mainly composed of pyroelectric sensitive layer-lead titanate, thermal isolating layer-porous silicon dioxide film, and the buffer layer-dense silicon dioxide film. A pyroelectric measuring system was built to measure the infrared response of the detector. The voltage response and the specific detectivity of the detector were given too.