Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation

A direct numerical inversion method for the determination of the refractive index and the thickness of the outermost layer of a thin transparent film on top of a multilayer has been developed. This method is based on a second-order Taylor decomposition of the coefficients of the Abeles matrices of the newly grown layer. The variations of the real-time spectroscopic ellipsometry data are expressed as polynomial functions depending on the dielectric constant and the thickness of the newly grown layer. The method is fast, capable of single-wavelength and multiwavelength inversion of continuous as well as discontinuous-index profiles, and can be adapted to many different polarimetric instruments. © 2002 Optical Society of America.