A hybrid roll-to-roll AFM set-up for high throughput tip-based nano-machining

被引：6
|
作者：
Brousseau, Emmanuel [1 ]
Al-Musawi, Raheem S.J. [1 ]
Lebiez, Damien [1 ]
机构：
[1] Cardiff School of Engineering, Cardiff University, Cardiff, United Kingdom
来源：
Manufacturing Letters | 2015年 / 6卷
关键词：
Nanotechnology - Throughput - Cost effectiveness - Cutting tools - Probes - Cutting;
D O I：
10.1016/j.mfglet.2015.11.002
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：10 / 13
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