Comprehensive error modeling and compensation for precision polishing platform based on orthogonal experiment and interpolation algorithm

被引：2
|
作者：
Zhang, En-Zhong [1 ,2 ]
Zhao, Ji [1 ]
Ji, Shi-Jun [1 ]
Li, Gang [2 ]
机构：
[1] College of Mechanical Science and Engineering, Jilin University, Changchun,130022, China
[2] School of Mechatronic Engineering, Changchun University of Technology, Changchun,130012, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2015年 / 23卷 / 12期
关键词：
D O I：
10.3788/OPE.20152312.3422
中图分类号：
学科分类号：
摘要：
18
引用
收藏
页码：3422 / 3429
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