Dynamic test system for MEMS in high load condition based on virtual instrument

被引：0
|
作者：
Sun, Yibo [1 ]
Wang, Xiaodong [1 ]
She, Dongsheng [1 ]
Wang, Tao [1 ]
Wang, Liding [1 ]
机构：
[1] Key Laboratory for Precision and Non-traditional Machining Technology, Dalian University of Technology, Dalian 116024, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2009年 / 30卷 / 01期
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学科分类号：
摘要：
10
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页码：29 / 34
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