Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

被引：0
|
作者：
Bajt, Saša [1 ]
Chapman, Henry N. [1 ]
Nguyen, Nhan [1 ]
Alameda, Jennifer [1 ]
Robinson, Jeffrey C. [1 ]
Malinowski, Michael [2 ]
Gullikson, Eric [3 ]
Aquila, Andrew [3 ]
Tarrio, Charles [4 ]
Grantham, Steven [4 ]
机构：
[1] Lawrence Livermore Natl. Laboratory, 7000 East Avenue, Livermore, CA 94550, United States
[2] Sandia National Laboratories, 7011 East Avenue, Livermore, CA 94550, United States
[3] Lawrence Berkeley Natl. Laboratory, Center for X-ray Optics, Berkeley, CA 94720, United States
[4] Natl. Inst. of Std. and Technology, Gaithersburg, MD 20899, United States
来源：
Applied Optics | 2003年 / 42卷 / 28期
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摘要：
Multilayers
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页码：5750 / 5758
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