Evaluation of residual stresses in chemical-vapor-deposited diamond films

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作者：
Fan, Qi Hua
Gracio, J.
Pereira, E.
机构：
[1] Department of Physics, Ctr. for Mech. Technol. and Automat., University of Aveiro, 3810 Aveiro, Portugal
[2] Department of Mechanical Engineering, Ctr. for Mech. Technol. and Automat., University of Aveiro, 3810 Aveiro, Portugal
[3] Department of Physics, University of Aveiro, 3810 Aveiro, Portugal
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| 1600年 / American Institute of Physics Inc.卷 / 87期
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