Control of Hysteresis Nonlinearity for Scanning Stage in Scanning Tunneling Microscope

被引：0
|
作者：
Ji H. [1 ]
Sun H. [1 ]
Qiu J. [1 ]
Chen Y. [2 ]
Zhu K. [1 ]
机构：
[1] State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing
[2] School of Energy and Power Engineering, Nanjing University of Science and Technology, Nanjing
来源：
| 2017年 / Nanjing University of Aeronautics an Astronautics卷 / 37期
关键词：
Hysteresis control; Piezoelectric actuator; Scanning control; Scanning tunneling microscope;
D O I：
10.16450/j.cnki.issn.1004-6801.2017.02.002
中图分类号：
学科分类号：
摘要：
Piezoelectric actuators have been widely applied in scanning tunneling microscope (STM). A controller combining inverse hysteresis model and PID control law was designed for the STM to compensate for the hysteresis nonlinearity of piezoelectric actuators and to improve the scanning accuracy. For the purpose of comparing the proposed controller with classical displacement feedback control law, experimental system was built in this investigation. The relative measuring error of grating period and width of grating line were 4.41% and 2.65% using the classic displacement feedback control method respectively. And they were reduced to 1.26% and 0.27% in proposed method. Experimental results indicate that the error caused by hysteresis nonlinearity has been well compensated, and the scanning accuracy is improved with the help of such controller. © 2017, Editorial Department of JVMD. All right reserved.
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页码：221 / 227
页数：6
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