SOI sensors and epitaxial MEMS

被引：0
|
作者：
Ishida, Makoto [1 ]
机构：
[1] Dept. of Elec. and Electron. Eng., Toyohashi University of Technology, Hibarigaoka 1-1, Tempaku-cho, Toyohashi 441-8580, Japan
来源：
| 2001年 / Indian Institute of Science卷 / 81期
关键词：
Accelerometers - Chemical vapor deposition - High temperature operations - Scanning electron microscopy - Semiconductor device structures - Sensors - Silicon on insulator technology - Silicon wafers - Technological forecasting;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper reviews the development of pressure and acceleration sensors using SOL wafers. SOL structures help in high-temperature operation and simplify the fabrication process. MEMS technology and devices studied in the author's lab are also presented.
引用
收藏
页码：619 / 626
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