Dual-wavelength interferometric technique with subnanometric resolution

被引：0
|
作者：
Chen, Benyong [1 ]
Cheng, Xiaohui [1 ]
Li, Dacheng [1 ]
机构：
[1] Department of Precision Instruments, Tsinghua University, Beijing 100084, China
来源：
Applied Optics | 2002年 / 41卷 / 28期
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摘要：
A new fringe subdivision method that employs a large synthetic wavelength to subdivide fringes formed by a small single wavelength is proposed. Based on this subdivision method, we demonstrate a novel dual-wavelength interferometric technique with subnanometric resolution, whose potential fringe subdivision factor derived from an evaluation of the interferometer can reach up to 1/440,000. Theoretical analysis and experimental results with a resolution of 0.05 nm are presented to show the feasibility of the interferometric technique. © 2002 Optical Society of America.
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页码：5933 / 5937
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