Thermodynamic analysis of chemical vapor deposition process for ZrC coating

被引:0
|
作者
Fu, Zhi-Qiang [1 ]
Tang, Chun-He [2 ]
Liang, Tong-Xiang [2 ]
Li, Zi-Qiang [2 ]
Wang, Cheng-Biao [1 ]
Zhou, Jia-Bin [1 ]
机构
[1] School of Engineering and Technology, China University of Geoscience at Beijing, Beijing 100083, China
[2] Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing 100084, China
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:297 / 300
相关论文
共 50 条
  • [1] THERMODYNAMIC CONSIDERATION OF CHEMICAL VAPOR DEPOSITION PROCESS
    ROBINSON, WC
    FEDERER, JI
    JOURNAL OF METALS, 1968, 20 (01): : A88 - &
  • [2] THERMODYNAMIC APPROACH TO THE CHEMICAL-VAPOR-DEPOSITION PROCESS
    HWANG, NM
    YOON, DY
    JOURNAL OF CRYSTAL GROWTH, 1994, 143 (1-2) : 103 - 109
  • [3] CHEMICAL VAPOR-DEPOSITION OF ZRC WITHIN A SPOUTED BED BY BROMIDE PROCESS
    OGAWA, T
    IKAWA, K
    IWAMOTO, K
    JOURNAL OF NUCLEAR MATERIALS, 1981, 97 (1-2) : 104 - 112
  • [4] Effect of deposition time on growth of ZrC/SiC composite coating synthesized by low pressure chemical vapor deposition
    Wang, Fangwei
    Chen, Lei
    Wang, Yujin
    Yao, Mianyi
    Hao, Sue
    Ouyang, Jiahu
    Huang, Zhenkun
    CERAMICS INTERNATIONAL, 2017, 43 (02) : 2853 - 2858
  • [5] Thermodynamic and kinetic studies on chemical vapor deposition process of TiC
    Northwestern Polytechnical Univ, Xi'an, China
    Cailiao Gongcheng/Journal of Materials Engineering, 1998, (10): : 25 - 29
  • [6] FACTORS INFLUENCING CHEMICAL VAPOR-DEPOSITION OF ZRC
    WAGNER, P
    WAHMAN, LA
    WHITE, RW
    HOLLABAUGH, CM
    REISWIG, RD
    JOURNAL OF NUCLEAR MATERIALS, 1976, 62 (2-3) : 221 - 228
  • [7] Fabrication of Uniform ZrC Coating by Low Pressure Chemical Vapor Deposition: The in-situ Bromination Method
    Ma Xin
    Hu Haifeng
    Qiu Haipeng
    RARE METAL MATERIALS AND ENGINEERING, 2018, 47 : 58 - 61
  • [8] Fabrication of Uniform ZrC Coating by Low Pressure Chemical Vapor Deposition: The in-situ Bromination Method
    Ma, Xin
    Hu, Haifeng
    Qiu, Haipeng
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2018, 47 : 58 - 61
  • [9] Numerical simulation of chemical vapor deposition process for fabrication of SiC coating
    C/C Composites Technology Research Center, Northwestern Polytechnical University, Xi'an 710072, China
    Hsi An Chiao Tung Ta Hsueh, 2007, 9 (1070-1074):
  • [10] Leveraging computational thermodynamics to guide SiC-ZrC chemical vapor deposition process development
    Lamm, Benjamin W.
    McMurray, Jake W.
    Cakmak, Ercan
    Lance, Michael J.
    Mitchell, David J.
    SURFACE & COATINGS TECHNOLOGY, 2022, 444