共 50 条
- [1] THERMODYNAMIC CONSIDERATION OF CHEMICAL VAPOR DEPOSITION PROCESS JOURNAL OF METALS, 1968, 20 (01): : A88 - &
- [5] Thermodynamic and kinetic studies on chemical vapor deposition process of TiC Cailiao Gongcheng/Journal of Materials Engineering, 1998, (10): : 25 - 29
- [8] Fabrication of Uniform ZrC Coating by Low Pressure Chemical Vapor Deposition: The in-situ Bromination Method Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2018, 47 : 58 - 61
- [9] Numerical simulation of chemical vapor deposition process for fabrication of SiC coating Hsi An Chiao Tung Ta Hsueh, 2007, 9 (1070-1074):
- [10] Leveraging computational thermodynamics to guide SiC-ZrC chemical vapor deposition process development SURFACE & COATINGS TECHNOLOGY, 2022, 444