Spatial distribution of the electron component parameters in nitrogen plasma of a microwave electrode discharge at reduced pressure

被引：0
|
作者：
Lebedev, Yu.A. [1 ]
Krashevskaya, G.V. [1 ,2 ]
Gogoleva, M.A. [1 ]
机构：
[1] Topchiev Institute of Petrochemical Synthesis RAS, 29 Leninsky av., Moscow,119991, Russia
[2] National Research Nuclear University, MEPhI, 31 Kashirskoe shosse, Moscow,115409, Russia
来源：
Applied Physics | 2015年 / 01期
关键词：
Probes - Spatial distribution - Electric discharges - Microwave antennas - Microwaves - Electron temperature - Nitrogen plasma;
D O I：
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学科分类号：
摘要：
The double probe method was used to measure the spatial distributions of charged particle density, electron temperature, and DC potential in the electrode microwave discharge in nitrogen at a pressure of 1 Torr. It is shown that charged particle concentration exceeds a critical value near the electrode/antenna. Concentration and axial nonuniformity of the discharge increases with increasing microwave power.
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页码：30 / 34
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