Proximity sensing for polishing robot by using an optical sensing system of surface roughness sensor

被引：0
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作者：
Harada, Hiroshi
Kawano, Mitsuji
Yamaguchi, Teruo
Noda, Atsuhiko
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2002年 / 68卷 / 09期
关键词：
Active sensing - Optical measurements;
D O I：
10.2493/jjspe.68.1206
中图分类号：
学科分类号：
摘要：
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页码：1206 / 1210
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