Optical properties of VO2 nano periodic array

被引：0

作者：

Tang J.-Y. ^{[1
]}

Li Y. ^{[1
,2
]}

Sun Y. ^{[1
]}

Liu F. ^{[1
]}

Hao R.-L. ^{[1
]}

Wu Z.-Y. ^{[1
]}

Jiang W. ^{[1
]}

Xu T.-T. ^{[1
]}

Chen P.-Z. ^{[1
]}

Fang B.-Y. ^{[1
]}

Wang X.-H. ^{[1
,3
]}

Xiao H. ^{[1
]}

机构：

[1] School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai

[2] Shanghai Key Laboratory of Modern Optical Systems, Shanghai

[3] Department of Computer and Information Engineering, Shanghai University of Electric Power, Shanghai

来源：

Li, Yi (optolyclp@263.net) | 1600年 / Chinese Optical Society卷 / 35期

关键词：

Nano periodic array; Optical property; Thermochromism; VO[!sub]2[!/sub;

D O I：

10.11972/j.issn.1001-9014.2016.02.019

中图分类号：

学科分类号：

摘要：

The optical properties of VO2 nano periodic array were studied in order to obtain low phase transition temperature and high quality optical material widely used in the field of intelligent window. Optical properties of VO2 nano periodic array at different filling ratios were calculated with finite difference time domain method, and the best VO2 nano periodic array was selected. Vanadium film was deposited on the glass substrate by magnetic DC sputtering, then VO2 film was formed by annealing under air condition, and VO2 nano periodic array was gained by photolithography and etching technology. Its microstructure and optical properties were tested by SEM, XRD and XPS as well as spectrophotometer. The results show that the phase transition temperature of VO2 nano periodic array with filling ratio 0.74 decrease about 25℃ and the transmittance has changed 39% between the metallic and semiconducting states at 1700 nm. VO2 nano periodic array exhibits the better optical properties than VO2 film before and after phase transition. It is indicated that the optical properties can be improved through regulating the structure of VO2 nano periodic array. © 2016, Science Press. All right reserved.

引用

页码：227 / 232

页数：5

共 19 条

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