Electron cyclotron resonance ion source for material surface treatment

被引：0
|
作者：
Ming, Jianchuan [1 ]
Guo, Zhiyu [1 ]
Peng, Shixiang [1 ]
机构：
[1] State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2012年 / 24卷 / 12期
关键词：
D O I：
10.3788/HPLPB20122412.2911
中图分类号：
学科分类号：
摘要：
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页码：2911 / 2914
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