Study on the characteristics of multilayer dielectric grating profile by the rigorous coupled-wave method

被引：0
|
作者：
Wan, Hua [1 ]
Chen, Xin-Rong [1 ]
Wu, Jian-Hong [1 ]
机构：
[1] Institute of Information Optical Engineering, Suzhou University, Suzhou 215006, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2005年 / 32卷 / 09期
关键词：
Detection of gratings mask - Diffraction and gratings - Multilayer dielectric stack - Rigorous coupled-wave method;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1275 / 1280
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