Development of hybrid-type MEMS microgripper

In order to realize the steady and reliable operations of microobjects, a hybrid-type electrostatic silicon microgripper integrated with gas pipes for aspirating and blowing operations is developed and its structure and dynamic characteristics are analyzed by the Finite Elemenl Analysis (FEA). Gas pipes integrated in this novel microgripper are used to improve its picking and placing capability and a bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafers. The linear horizontal motion generated by an electrostatic microactuator is converted into the rotational motion of the arm by the S-type flexible beam system to realize the gripping motion. Moreover, the grippers with two different dimensions are designed to expand the manipulating range and the gas pressure control system and electrostatic comb drive control system are designed for controlling the microgripper. Experiments show that the deflection is 25m at the arm tip of the gripper in a driving voltage of 80 V, and the microobjects can be picked and placed successfully from 100m to 200m in the experiment, which indicates that this microgripper realizes the steady manipulation and can satisfy the micromanipulation of the microobjects from 100m to 200m.