The Seven-State RF MEMS Miniaturized Broadband Reconfigurable Step Attenuator

被引：0
|
作者：
Si, Yuheng [1 ,2 ,3 ,4 ]
Chen, Siming [5 ]
Fu, Peifang [5 ]
Yu, Jian [1 ,2 ,3 ,4 ]
Ma, Binyi [1 ,2 ,3 ,4 ]
Wu, Qiannan [2 ,3 ,4 ,5 ]
Li, Mengwei [1 ,2 ,3 ,4 ,6 ]
机构：
[1] North Univ China, Sch Instrument & Elect, Taiyuan 030051, Peoples R China
[2] North Univ China, Sch Instrument & Intelligent Future Technol, Taiyuan 030051, Peoples R China
[3] North Univ China, Acad Adv Interdisciplinary Res, Taiyuan 030051, Peoples R China
[4] North Univ China, Ctr Microsyst Intergrat, Taiyuan 030051, Peoples R China
[5] North Univ China, Sch Semicond & Phys, Taiyuan 030051, Peoples R China
[6] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China
来源：
MICROMACHINES | 2024年 / 15卷 / 10期
关键词：
RF MEMS; thin film resistor; broadband; reconfigurable step attenuator; DESIGN; ANTENNA;
D O I：
10.3390/mi15101182
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper presents a three-channel reconfigurable step attenuator based on radio frequency (RF) microelectromechanical system (MEMS) switches, in response to the current issues of high insertion loss and low attenuation accuracy of attenuators. The coplanar waveguide (CPW), cross-shaped power dividers, RF MEMS switches, and pi-type attenuation resistor networks are designed as a basic unit of the attenuator. The attenuator implemented attenuation of 0 similar to 30 dB at 5 dB intervals in the frequency range of 1 similar to 25 GHz through two basic units. The results show that the insertion loss is less than 1.41 dB, the attenuation accuracy is better than 2.48 dB, and the geometric size is 2.4 mm x 4.0 mm x 0.7 mm. The attenuator can be applied to numerous fields such as radar, satellites, aerospace, electronic communication, and so on.
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页数：13
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