Experimental study on micro-nano scale cutting characteristics of single crystal germanium

被引:0
|
作者
Yang X.-J. [1 ]
Liu H. [1 ]
Luo L. [1 ]
Liu N. [1 ]
机构
[1] Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming
基金
中国国家自然科学基金;
关键词
Constant load nano-scratch test; Cutting characteristics; Cutting force; Micro-nano-scale; Single crystal germanium; Variable load nano-scratch test;
D O I
10.19476/j.ysxb.1004.0609.2019.07.14
中图分类号
学科分类号
摘要
The variable load and constant load nano-scratch experiments of single crystal germanium were carried out by using nano-indentation apparatus. The effects of different scratch speeds and different loads on the cutting characteristics of single crystal germanium were analyzed. The surface of the sample was scanned by atomic force microscopy and the material removal mechanism of micro-nano-scale cutting of single crystal germanium was investigated. The results show that when the scratch speeds are 10, 20 and 50 μm/s, the critical cutting forces of the brittle-ductility transition of Ge(100) surface are 10.2, 12.1 and 9.8 mN respectively, showing a pattern of increasing first and then decreasing. The critical cutting forces of Ge(110) crystal surface are 9.5, 7.7 and 6.9 mN, presenting a regularity that the critical cutting force decreases as the scratch speed increases. The critical cutting forces of Ge(111) are 8.3, 8.5 and 8.9 mN, showing that the alteration of the scratch speed has no effect on the change of the cutting force. Moreover, when the loads are 10, 30 and 50 mN, the cutting forces of Ge(110) are 0.3, 4.5 and 12.5 mN, respectively. Therefore, with the increase of scratching speed, the cutting behavior of single crystal germanium shows obvious anisotropy. As the load increases, the cutting force of the single crystal germanium augments accordingly, and the fluctuation range of the cutting force becomes larger and larger, which provides data support for the analysis of the micro-nano-scale plastic domain cutting of single crystal germanium. © 2019, Science Press. All right reserved.
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页码:1457 / 1465
页数:8
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