Effects of annealing temperature on microstructure and electric properties of Al Films

被引：0
|
作者：
Cheng, Bing-Xun [1 ,2 ]
Wu, Wei-Dong [1 ]
He, Zhi-Bing [1 ]
Xu, Hua [1 ]
Tang, Yong-Jian [1 ]
Lu, Tie-Cheng [2 ]
机构：
[1] Research Center of Laser Fusion, CAEP, P.O. Box 919-987, Mianyang 621900, China
[2] Key Laboratory for Irradiation Physics and Technology, Department of Physics, Sichuan University, Chengdu 610064, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2008年 / 20卷 / 01期
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摘要：
11
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页码：155 / 158
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