Influence of nitrogen laser beam on thin-film coatings

被引：0
|
作者：
Lubenko, D.M. [1 ]
Akhmadeev, Yu. Kh. [1 ]
Krysina, O.V. [1 ]
Chumakov, Yu. A. [2 ]
机构：
[1] Institute of High Current Electronics, Siberian Branch of the Russian Academy of Sciences, 2/3 Akademichesky Ave, Tomsk,634055, Russia
[2] Institute of Strength Physics and Materials Science, Siberian Branch of the Russian Academy of Sciences, 2/4 Akademichesky Ave, Tomsk,634021, Russia
来源：
High Temperature Material Processes | 2013年 / 17卷 / 2-3期
关键词：
Irradiation - Aluminum coatings - Vacuum applications - Laser ablation - Nitrogen - Laser beams;
D O I：
10.1615/HighTempMatProc.2015013757
中图分类号：
学科分类号：
摘要：
This paper presents the results of experimental and theoretical studies of the influence of a nanosecond laser beam of UV band (λ = 337 nm) with energy of up to 1 mJ on a surface of thin (0.5–5 μm) coatings (Ti, TiN, Al–Si, Al–Si–N) deposited on a glass substrate by a vacuum-arc method. Based on the data obtained, the dependences of the effect of explosive spark formation on the thickness of a coating, its properties, and the conditions of laser influence in an atmosphere of different gases are presented. The mathematical model of the processes occurring in a coating/substrate system exposed to laser irradiation is described; the value of the thickness of a coating at which its destruction occurs with intense sparking is defined. © 2013 by Begell House, Inc.
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页码：161 / 169
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