Study on the wear-resistance SiC films prepared by magnetron sputtering on steel

SiC films on 40Cr steel were gained by magnetron sputtering method. Influence of different process parameters, sputtering methods on the properties of the films was studied with X-ray diffraction test, FT-IR spectroscopic analysis, friction and wear test and scratching test. The results showed that SiC films prepared by RF magnetron sputtering at room temperature are amorphous. FT-IR spectroscopic analysis proves that there are Si-C bond and more Si-Si bond in the film. The films prepared by RF magnetron sputtering are smoother, dense and have better adherence than those prepared by DC magnetron sputtering under the same parameters. Furthermore, the films prepared by RF magnetron sputtering under the power of 200 W, the time of 2h and the pressure of 0.1 Pa have the best properties.