Low-temperature preparation of SrBi2Ta2O9 thin films by electron cyclotron resonance plasma-enhanced metalorganic chemical vapor deposition and their electrical properties

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[1] Nukaga, Norimasa
[2] Mitsuya, Masatoshi
[3] Funakubo, Hiroshi
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Nukaga, Norimasa | 1600年 / JJAP, Tokyo期
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