Effect of sputtering atmosphere on the structure and optical properties of ZnO thin films by RF reactive magnetron sputtering

被引：0
|
作者：
You, Wei-Guo [1 ]
Zhang, Yong [1 ]
Li, Jing [1 ]
Yang, Feng [1 ]
Cheng, C.H. [2 ]
Zhao, Yong [1 ,2 ]
机构：
[1] Superconductivity R and D Center (SRDC), Southwest Jiaotong University, Chengdu 610031, China
[2] School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
来源：
Faguang Xuebao/Chinese Journal of Luminescence | 2010年 / 31卷 / 04期
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16;
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页码：503 / 508
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