Research on silicon-based planar spiral inductance coil based on MEMS

被引：0
|
作者：
Li, Gang [1 ]
Zhao, Xiaofeng [1 ]
Wen, Dianzhong [1 ]
Yu, Yang [1 ]
机构：
[1] Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, No.74 of Xufu Road, Nangang district, Haerbin, Heilongjiang Province, China
来源：
Telkomnika (Telecommunication Computing Electronics and Control) | 2015年 / 13卷 / 04期
关键词：
All Open Access; Hybrid Gold; Green;
D O I：
10.12928/telkomnika.v13i4.1818
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：1127 / 1132
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