Macromodel for the comb resonator with F-I analogy method and analysis with SPICE

被引：0
|
作者：
Wen, Feina [1 ]
Li, Weihua [1 ]
Rong, Hua [1 ]
机构：
[1] Lab. of MEMS, Southeast Univ., Nanjing 210096, China
来源：
Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics | 2003年 / 23卷 / 03期
关键词：
Electrostatic devices - Equivalent circuits - Mathematical models;
D O I：
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中图分类号：
学科分类号：
摘要：
The horizontal movement of the parallel electrostatic transducer's plate under a small signal's stimulus is analysed and the electromechanical relationship suitable for F-I analogy is deduced. Because there are no corresponding models for the relationship in the device cell library of SPICE, it is difficult to describe the system completely including this transducer structure in SPICE language. Two equivalent circuits which can be described in SPICE language are presented in order to get a complete description to comb resonator's macromodel with the F-I analogy method. The verification is given.
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页码：344 / 348
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