Design and simulation of a novel dual current mirror based CMOS-MEMS integrated pressure sensor

被引:0
|
作者
Kumar, Shashi [1 ]
Ropmay, Gaddiella Diengdoh [1 ]
Rathore, Pradeep Kumar [1 ]
Rangababu, Peesapati [1 ]
Akhtar, Jamil [2 ]
机构
[1] Department of Electronics and Communication Engineering, National Institute of Technology Meghalaya, Shillong, India
[2] School of Electrical, Electronics and Communication Engineering, Manipal University Jaipur, Jaipur, India
来源
关键词
Pressure sensors;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:268 / 278
相关论文
共 50 条
  • [1] Design and simulation of a novel dual current mirror based CMOS-MEMS integrated pressure sensor
    Kumar, Shashi
    Ropmay, Gaddiella Diengdoh
    Rathore, Pradeep Kumar
    Rangababu, Peesapati
    Akhtar, Jamil
    IET SCIENCE MEASUREMENT & TECHNOLOGY, 2021, 15 (03) : 268 - 278
  • [2] Design and Optimization of a CMOS-MEMS Integrated Current Mirror Sensing based MOSFET Embedded Pressure Sensor
    Rathore, Pradeep Kumar
    Panwar, Brishbhan Singh
    2013 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS (CCA), 2013, : 443 - 448
  • [3] A novel CMOS-MEMS integrated pressure sensing structure based on current mirror sensing technique
    Rathore, Pradeep Kumar
    Panwar, Brishbhan Singh
    Akhtar, Jamil
    MICROELECTRONICS INTERNATIONAL, 2015, 32 (02) : 81 - 95
  • [4] Development of a current mirror-integrated pressure sensor using CMOS-MEMS cofabrication techniques
    Kumar, Shashi
    Rathore, Pradeep Kumar
    Panwar, Brishbhan Singh
    Akhtar, Jamil
    MICROELECTRONICS INTERNATIONAL, 2018, 35 (04) : 203 - 210
  • [5] A capacitive CMOS-MEMS sensor designed by multi-physics simulation for integrated CMOS-MEMS technology
    Konishi, Toshifumi
    Yamane, Daisuke
    Matsushima, Takaaki
    Masu, Kazuya
    Machida, Katsuyuki
    Toshiyoshi, Hiroshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2014, 53 (04)
  • [6] CMOS-MEMS Integrated MOSFET Embedded Bridge Structure based Pressure Sensor
    Rathore, Pradeep Kumar
    Panwar, Brishbhan Singh
    2013 ANNUAL IEEE INDIA CONFERENCE (INDICON), 2013,
  • [7] Design and Simulation of Mass-sensitive Gas Sensor Based on CMOS-MEMS Resonator
    Ahmed, A. Y.
    Dennis, J. O.
    Khir, M. H. Md
    Saad, M. N. Mohamad
    INTERNATIONAL CONFERENCE ON FUNDAMENTAL AND APPLIED SCIENCES 2012 (ICFAS2012), 2012, 1482 : 673 - 676
  • [8] Dual Phase Modulation of CMOS-MEMS Vacuum Sensor
    Chen, Shu-Jung
    Wu, Yung-Chuan
    PROCEEDINGS OF THE 2019 IEEE EURASIA CONFERENCE ON IOT, COMMUNICATION AND ENGINEERING (ECICE), 2019, : 1 - 4
  • [9] Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor
    Chien, Tung-Lin
    Shih, Fuchi
    Huang, Yuanyuan
    Chen, Yen-Lin
    Fang, Weileun
    IEEE SENSORS JOURNAL, 2022, 22 (24) : 23724 - 23733
  • [10] A design of integrated CMOS-MEMS infrared emitter arrays
    Cheng Zhengxi
    Toshiyoshi, Hiroshi
    IEICE ELECTRONICS EXPRESS, 2016, 13 (07):