New high performance poly-Si TFT by XeCl excimer laser recrystallization of a-Si for AMLCD

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作者：
Song, In-Hyuk [1 ]
Han, Min-Koo [1 ]
机构：
[1] Sch. of Elec. Eng., Seoul Natl. Univ., Seoul 151-742, Korea, Republic of
来源：
Rare Metals | 2002年 / 21卷 / SUPPL.期
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4
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页码：23 / 27
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