Radiation properties of plasma produced by ultraviolet laser ablation of metal Cu

Time-resolved measurement of plasma plume emission spectra from XeCl excimer laser ablation of copper in nitrogen is reported. The experimental results indicate that the plasma emission spectra are mainly composed of atomic spectrum, univalent ion spectrum and continuous radiation, and these spectral lines have different number, intensity and duration. The main detailed mechanism of species excitation was discussed. The electrons obtain high-kinetic energy through reverse bremsstrahlung, the continuous radiation comes from the bremsstrahlung emission of energetic electrons ejected from the target, the excitation mechanism of atomic and univalent ion is inelastic collision between the elemental species and high kinetic-energy electron, and recombination of electron and ion in the plasma, and the model can be used to explain the experimental results qualitatively.